在Si衬底上生长ZnO薄膜的方法


Autoria(s): 崔军朋; 段垚; 王晓峰; 曾一平
Data(s)

18/03/2009

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/4321

http://www.irgrid.ac.cn/handle/1471x/61642

Idioma(s)

中文

Fonte

崔军朋;段垚;王晓峰;曾一平,在Si衬底上生长ZnO薄膜的方法 ,CN200710121659.2,20070912

Tipo

专利