氧化物的化学气相沉积制备装置及制备方法
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14/01/2009
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| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08 Made available in DSpace on 2009-06-11T08:58:32Z (GMT). No. of bitstreams: 1 full/CN200710118635.1.pdf: 1236338 bytes, checksum: e25d75c475a05677a57202c0eb24d1ee (MD5) Previous issue date: |
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| Idioma(s) |
中文 |
| Fonte |
段垚;王晓峰;崔军朋;曾一平,氧化物的化学气相沉积制备装置及制备方法 ,CN200710118635.1,20070711 |
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专利 |
