一种氮化物材料外延装置


Autoria(s): 段瑞飞; 王军喜; 曾一平; 李晋闽
Data(s)

14/01/2009

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/4267

http://www.irgrid.ac.cn/handle/1471x/61615

Idioma(s)

中文

Fonte

段瑞飞;王军喜;曾一平;李晋闽,一种氮化物材料外延装置 ,CN200710118634.7,20070711

Tipo

专利