高温原位减薄硅基底的装置和方法
| Data(s) |
31/12/2008
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| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08 Made available in DSpace on 2009-06-11T08:58:31Z (GMT). No. of bitstreams: 1 full/CN200710118005.4.pdf: 319695 bytes, checksum: 03e6d2f7e7113f2c1de42a2d65152392 (MD5) Previous issue date: |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
刘祥林;杨少延;焦春美,高温原位减薄硅基底的装置和方法,CN200710118005.4,20070627 |
| Tipo |
专利 |
