用于氮化物外延生长的图形蓝宝石衬底的制作方法


Autoria(s): 闫发旺; 高海永; 张扬; 李晋闽; 曾一平; 王国宏; 张会肖
Data(s)

24/12/2008

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/4257

http://www.irgrid.ac.cn/handle/1471x/61610

Idioma(s)

中文

Fonte

闫发旺;高海永;张扬;李晋闽;曾一平;王国宏;张会肖,用于氮化物外延生长的图形蓝宝石衬底的制作方法,CN200710117617.1,20070620

Tipo

专利