一种独立供应金属卤化物的氢化物气相外延装置
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25/06/2008
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| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08 Made available in DSpace on 2009-06-11T08:58:27Z (GMT). No. of bitstreams: 1 full/CN200610165539.8.pdf: 554044 bytes, checksum: 6ea124756f46c979024f7842a6aea294 (MD5) Previous issue date: |
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| Idioma(s) |
中文 |
| Fonte |
段瑞飞;王军喜;曾一平;李晋闽,一种独立供应金属卤化物的氢化物气相外延装置 ,CN200610165539.8,20061221 |
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专利 |
