一种具有薄氮化铪可协变层的硅基可协变衬底材料


Autoria(s): 杨少延; 范海波; 李成明; 陈涌海; 王占国
Data(s)

02/07/2008

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/4095

http://www.irgrid.ac.cn/handle/1471x/61529

Idioma(s)

中文

Fonte

杨少延;范海波;李成明;陈涌海;王占国,一种具有薄氮化铪可协变层的硅基可协变衬底材料 ,200610169749,20061228

Tipo

专利