在微波、臭氧环境下ITO玻璃的处理方法与装置


Autoria(s): 曹峻松; 秦大山; 曹国华; 曾一平; 李晋闵
Data(s)

30/01/2008

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3955

http://www.irgrid.ac.cn/handle/1471x/61459

Idioma(s)

中文

Fonte

曹峻松;秦大山;曹国华;曾一平;李晋闵,在微波、臭氧环境下ITO玻璃的处理方法与装置 ,200610088953,20060727

Tipo

专利