硅V形槽板及利用硅V形槽板装配微丝电极阵列的方法


Autoria(s): 陈弘达; 张若昕; 裴为华; 隋小红
Data(s)

30/01/2008

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3949

http://www.irgrid.ac.cn/handle/1471x/61456

Idioma(s)

中文

Fonte

陈弘达;张若昕;裴为华;隋小红,硅V形槽板及利用硅V形槽板装配微丝电极阵列的方法 ,200610088945,20060727

Tipo

专利