具有金属铪薄中间层的SOI型复合可协变层衬底


Autoria(s): 杨少延; 陈涌海; 李成明; 范海波; 王占国
Data(s)

15/08/2007

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3941

http://www.irgrid.ac.cn/handle/1471x/61452

Idioma(s)

中文

Fonte

杨少延;陈涌海;李成明;范海波;王占国,具有金属铪薄中间层的SOI型复合可协变层衬底 ,200610003529,20060209

Tipo

专利