一种碳化硅外延生长用加热器旋转装置
| Data(s) |
02/01/2008
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| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
孙国胜;王雷;赵万顺;李家业;赵永梅;刘兴昉,一种碳化硅外延生长用加热器旋转装置,200720103516 ,20070207 |
| Tipo |
专利 |
