二维纳米结构深刻蚀方法


Autoria(s): 马小涛; 郑婉华; 杨国华; 任刚; 陈良惠
Data(s)

09/01/2008

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3927

http://www.irgrid.ac.cn/handle/1471x/61445

Idioma(s)

中文

Fonte

马小涛;郑婉华;杨国华;任刚;陈良惠,二维纳米结构深刻蚀方法 ,200610091006,20060707

Tipo

专利