采用干法刻蚀技术实现RTD与HEMT单片集成的方法
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31/10/2007
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| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08 Made available in DSpace on 2009-06-11T08:58:14Z (GMT). No. of bitstreams: 1 full/200610076521.pdf: 887829 bytes, checksum: df663a2e6d270bd15b244a0dfb0769ce (MD5) Previous issue date: |
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| Idioma(s) |
中文 |
| Fonte |
马龙;杨富华;王良臣;黄应龙,采用干法刻蚀技术实现RTD与HEMT单片集成的方法,200610076521 ,20060428 |
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专利 |
