可以修整抛光晶片平整度的抛光头
| Data(s) |
05/09/2007
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| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08 Made available in DSpace on 2009-06-11T08:58:11Z (GMT). No. of bitstreams: 1 full/200610011400.pdf: 272296 bytes, checksum: 1cab0ec2901436c466148257a224cd39 (MD5) Previous issue date: |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
朱蓉辉;惠峰;卜俊峰;郑红军;赵冀,可以修整抛光晶片平整度的抛光头,200610011400 ,20060301 |
| Tipo |
专利 |
