在硅衬底上生长无裂纹氮化镓薄膜的方法


Autoria(s): 刘喆; 李晋闽; 王军喜; 王晓亮; 王启元; 刘宏新; 王俊; 曾一平
Data(s)

23/05/2007

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3693

http://www.irgrid.ac.cn/handle/1471x/61328

Idioma(s)

中文

Fonte

刘喆;李晋闽;王军喜;王晓亮;王启元;刘宏新;王俊;曾一平,在硅衬底上生长无裂纹氮化镓薄膜的方法 ,200510086899,20051117

Tipo

专利