CMOS电路与MEMS微电极的单片集成化方法
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21/02/2007
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| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08 Made available in DSpace on 2009-06-11T08:58:02Z (GMT). No. of bitstreams: 1 full/200510090644.pdf: 538873 bytes, checksum: e7cbb7f80228b443e806279be2e15a6d (MD5) Previous issue date: |
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| Idioma(s) |
中文 |
| Fonte |
陈弘达;隋晓红;裴为华,CMOS电路与MEMS微电极的单片集成化方法 ,200510090644 ,20050818 |
| Tipo |
专利 |
