提高硅薄膜致密性的制备方法
| Data(s) |
28/03/2007
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| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08 Made available in DSpace on 2009-06-11T08:58:00Z (GMT). No. of bitstreams: 1 full/200510086466.pdf: 401843 bytes, checksum: 32bf93393944a3c0377c0347a875af59 (MD5) Previous issue date: |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
谭满清;赵妙,提高硅薄膜致密性的制备方法 ,200510086466 ,20050922 |
| Tipo |
专利 |
