原位非接触探测MOCVD石墨温度分布的方法


Autoria(s): 刘祥林; 赵凤瑷; 焦春美
Data(s)

11/10/2006

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3561

http://www.irgrid.ac.cn/handle/1471x/61262

Idioma(s)

中文

Fonte

刘祥林;赵凤瑷;焦春美,原位非接触探测MOCVD石墨温度分布的方法,200510063801,20050407

Tipo

专利