利用离子束外延生长设备制备氮化锆薄膜材料的方法
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31/05/2006
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Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08 Made available in DSpace on 2009-06-11T08:57:57Z (GMT). No. of bitstreams: 1 full/200410009815.pdf: 1293137 bytes, checksum: ca425b81cb1850dac9db7d1f0bf1bad4 (MD5) Previous issue date: |
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中文 |
Fonte |
杨少延;柴春林;刘志凯;陈涌海;陈诺夫;王占国,利用离子束外延生长设备制备氮化锆薄膜材料的方法,200410009815,20041118 |
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