利用密封石英玻璃管实现不同材料晶片键合的方法


Autoria(s): 杨国华; 孙永伟; 何国荣; 肖雪芳
Data(s)

31/05/2006

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Identificador

http://ir.semi.ac.cn/handle/172111/3497

http://www.irgrid.ac.cn/handle/1471x/61230

Idioma(s)

中文

Fonte

杨国华;孙永伟;何国荣;肖雪芳,利用密封石英玻璃管实现不同材料晶片键合的方法,200410009857,20041125

Tipo

专利