一种制备三元高K栅介质材料的方法


Autoria(s): 李艳丽; 陈诺夫; 刘立峰; 尹志刚; 杨菲; 柴春林
Data(s)

31/05/2006

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3491

http://www.irgrid.ac.cn/handle/1471x/61227

Idioma(s)

中文

Fonte

李艳丽;陈诺夫;刘立峰;尹志刚;杨菲;柴春林,一种制备三元高K栅介质材料的方法,200410009860,20041125

Tipo

专利