制备绝缘体上锗硅薄膜材料的方法


Autoria(s): 刘超; 高兴国; 李建平; 曾一平
Data(s)

31/05/2006

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3489

http://www.irgrid.ac.cn/handle/1471x/61226

Idioma(s)

中文

Fonte

刘超;高兴国;李建平;曾一平,制备绝缘体上锗硅薄膜材料的方法,200410009861,20041125

Tipo

专利