双异质外延SOI材料及制备方法


Autoria(s): 王启元; 王俊; 王建华
Data(s)

21/06/2006

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3443

http://www.irgrid.ac.cn/handle/1471x/61203

Idioma(s)

中文

Fonte

王启元;王俊;王建华,双异质外延SOI材料及制备方法,200410098933,20041216

Tipo

专利