一种III族氮化物衬底的生产设备


Autoria(s): 刘祥林; 焦春美
Data(s)

05/07/2006

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3437

http://www.irgrid.ac.cn/handle/1471x/61200

Idioma(s)

中文

Fonte

刘祥林;焦春美,一种III族氮化物衬底的生产设备,200410098993,20041223

Tipo

专利