金属有机物化学气相沉积设备反应室中的反烘烤沉积结构
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05/07/2006
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| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08 Made available in DSpace on 2009-06-11T08:57:52Z (GMT). No. of bitstreams: 1 full/200410101886.pdf: 632729 bytes, checksum: f29f017044b3b3a9a58890095bf1ca78 (MD5) Previous issue date: |
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| Idioma(s) |
中文 |
| Fonte |
刘祥林;焦春美,金属有机物化学气相沉积设备反应室中的反烘烤沉积结构,200410101886,20041230 |
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专利 |
