对砷化铝/砷化镓的砷化镓高选择比化学腐蚀液


Autoria(s): 黄应龙; 杨富华; 王良臣; 姜磊; 白云霞; 王莉
Data(s)

05/07/2006

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3419

http://www.irgrid.ac.cn/handle/1471x/61191

Idioma(s)

中文

Fonte

黄应龙;杨富华;王良臣;姜磊;白云霞;王莉,对砷化铝/砷化镓的砷化镓高选择比化学腐蚀液,200410101890,20041230

Tipo

专利