多孔磷化铟阻挡层以及多孔磷化铟的腐蚀液及使用方法


Autoria(s): 车晓玲; 刘峰奇; 黄秀颀; 雷文; 刘俊岐; 路秀真
Data(s)

30/08/2006

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3373

http://www.irgrid.ac.cn/handle/1471x/61168

Idioma(s)

中文

Fonte

车晓玲;刘峰奇;黄秀颀;雷文;刘俊岐;路秀真,多孔磷化铟阻挡层以及多孔磷化铟的腐蚀液及使用方法,200510011351,20050225

Tipo

专利