可提高砷化铝氧化均匀性的外延片承载装置
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03/05/2006
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| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08 Made available in DSpace on 2009-06-11T08:57:48Z (GMT). No. of bitstreams: 1 full/200420009923.pdf: 270568 bytes, checksum: d7961b6f87d5a572fedbcd99b382a57f (MD5) Previous issue date: |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
佟存柱;牛智川;韩勤;杜云;吴荣汉,可提高砷化铝氧化均匀性的外延片承载装置 ,CN200420009923.5,20041202 |
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专利 |
