真空镀膜机加热装置


Autoria(s): 路秀真; 常秀兰; 刘峰奇; 王占国
Data(s)

06/07/2005

Resumo

Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5)

Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08

Made available in DSpace on 2009-06-11T08:57:47Z (GMT). No. of bitstreams: 1 full/200420077769.pdf: 261327 bytes, checksum: a8ba99980b7f75226db6acd76c200bf2 (MD5) Previous issue date:

Identificador

http://ir.semi.ac.cn/handle/172111/3315

http://www.irgrid.ac.cn/handle/1471x/61139

Idioma(s)

中文

Fonte

路秀真;常秀兰;刘峰奇;王占国,真空镀膜机加热装置 ,CN200420077769.5,20040713

Tipo

专利