氧化膜外延设备


Autoria(s): 咎育德; 林兰英
Data(s)

11/07/2001

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3289

http://www.irgrid.ac.cn/handle/1471x/61126

Idioma(s)

中文

Fonte

咎育德;林兰英,氧化膜外延设备 ,CN00254687.6,20000922

Tipo

专利