一种化学气相淀积反应管


Autoria(s): 陆大成; 汪度; 昝育德; 刘祥林
Data(s)

30/09/1992

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3255

http://www.irgrid.ac.cn/handle/1471x/61109

Idioma(s)

中文

Fonte

陆大成;汪度;昝育德;刘祥林,一种化学气相淀积反应管 ,CN91229537.6,19911203

Tipo

专利