降低磷离子注入(0001)取向的4H-碳化硅电阻率的方法


Autoria(s): 高欣; 孙国胜; 李晋闽; 王雷; 赵万顺
Data(s)

04/01/2006

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/3159

http://www.irgrid.ac.cn/handle/1471x/61061

Idioma(s)

中文

Fonte

高欣;孙国胜;李晋闽;王雷;赵万顺,降低磷离子注入(0001)取向的4H-碳化硅电阻率的方法 ,CN200410049770.1,20040628

Tipo

专利