一种制备半导体衬底的方法
| Data(s) |
04/04/2001
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| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08 Made available in DSpace on 2009-06-11T08:57:36Z (GMT). No. of bitstreams: 1 full/99119469.pdf: 294287 bytes, checksum: e979f88aacdc78fa67286ca81542a380 (MD5) Previous issue date: |
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| Idioma(s) |
中文 |
| Fonte |
杨沁清;李成;欧海燕;王红杰;王启明,一种制备半导体衬底的方法 ,CN99119469.1,19990927 |
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专利 |
