气态束源炉瞬态开关控制真空装置


Autoria(s): 牛智川; 倪海桥; 徐晓华; 徐应强; 张纬; 韩勤; 吴荣汉
Data(s)

24/11/2004

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/2911

http://www.irgrid.ac.cn/handle/1471x/60937

Idioma(s)

中文

Fonte

牛智川;倪海桥;徐晓华;徐应强;张纬;韩勤;吴荣汉,气态束源炉瞬态开关控制真空装置 ,CN03136238.9,20030519

Tipo

专利