提高n型硅原位掺杂载流子浓度的方法


Autoria(s): 成步文
Data(s)

22/09/2004

Resumo

Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-06-04T08:36:34Z No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5)

Made available in DSpace on 2009-06-04T08:36:35Z (GMT). No. of bitstreams: 1 dspace.cfg: 33388 bytes, checksum: ac9630d3fdb36a155287a049e8b34eb7 (MD5) Previous issue date: 2008-08

Made available in DSpace on 2009-06-11T08:57:29Z (GMT). No. of bitstreams: 1 full/03119957.pdf: 253610 bytes, checksum: c4a0b3d2559bc53e5e4eb127064c4c6d (MD5) Previous issue date:

Identificador

http://ir.semi.ac.cn/handle/172111/2893

http://www.irgrid.ac.cn/handle/1471x/60928

Idioma(s)

中文

Fonte

成步文,提高n型硅原位掺杂载流子浓度的方法 ,CN03119957.7,20030310

Tipo

专利