高温退火非掺杂磷化铟制备半绝缘衬底的方法


Autoria(s): 赵有文
Data(s)

26/05/2004

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/2861

http://www.irgrid.ac.cn/handle/1471x/60912

Idioma(s)

中文

Fonte

赵有文,高温退火非掺杂磷化铟制备半绝缘衬底的方法 ,CN02150629.9,20021111

Tipo

专利