制备低温超薄异质外延用柔性衬底的方法


Autoria(s): 张志成; 杨少延; 黎大兵; 陈涌海; 朱勤生; 王占国
Data(s)

24/03/2004

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/2849

http://www.irgrid.ac.cn/handle/1471x/60906

Idioma(s)

中文

Fonte

张志成;杨少延;黎大兵;陈涌海;朱勤生;王占国,制备低温超薄异质外延用柔性衬底的方法 ,CN02142452.7,20020919

Tipo

专利