一种微区敷膜技术与装置


Autoria(s): 孙安纳; 崔莉; 张智宏
Data(s)

31/01/1990

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/2811

http://www.irgrid.ac.cn/handle/1471x/60887

Idioma(s)

中文

Fonte

孙安纳;崔莉;张智宏,一种微区敷膜技术与装置 ,CN88104273.0,19880714

Tipo

专利