与CMOS工艺兼容的硅光电探测器及制作方法


Autoria(s): 毛陆虹; 李伟; 陈弘达; 高鹏; 孙增辉; 陈永权
Data(s)

20/04/2005

Resumo

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Identificador

http://ir.semi.ac.cn/handle/172111/2757

http://www.irgrid.ac.cn/handle/1471x/60860

Idioma(s)

中文

Fonte

毛陆虹;李伟;陈弘达;高鹏;孙增辉;陈永权,与CMOS工艺兼容的硅光电探测器及制作方法 ,CN200310101069.5,20031014

Tipo

专利