High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre

A high efficiency and broad bandwidth grating coupler between a silicon-on-insulator (SOI) nanophotonic waveguide and fibre is designed and fabricated. Coupling efficiencies of 46% and 25% at a wavelength of 1.55 mu m are achieved by simulation and experiment, respectively. An optical 3 dB bandwidth of 45 nm from 1530 nm to 1575 nm is also obtained in experiment. Numerical calculation shows that a tolerance to fabrication error of 10 nm in etch depth is achievable. The measurement results indicate that the alignment error of +/-2 mu m results in less than 1 dB additional coupling loss.

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National Natural Science Foundation of China 60537010 60877036；National Basic Research Program of China 2006CB302803；Knowledge Innovation Program of Institute of Semiconductors, Chinese Academy of Sciences (ISCAS) ISCAS2008T10

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National Natural Science Foundation of China 60537010 60877036；National Basic Research Program of China 2006CB302803；Knowledge Innovation Program of Institute of Semiconductors, Chinese Academy of Sciences (ISCAS) ISCAS2008T10