AlN 晶体的离子注入掺杂及缺陷研究
| Contribuinte(s) |
赵有文 |
|---|---|
| Data(s) |
2009
|
| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z Made available in DSpace on 2009-04-13T11:45:31Z (GMT). Made available in DSpace on 2009-07-09T01:37:16Z (GMT). No. of bitstreams: 1 disk/eh2009/lww.pdf: 880191 bytes, checksum: 3f3a486a0ec2a518d300390f2c4945d3 (MD5) Previous issue date: 2009 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
李巍巍.AlN 晶体的离子注入掺杂及缺陷研究.[硕士].北京.中国科学院半导体研究所.2009 |
| Palavras-Chave | #材料物理与化学 |
| Tipo |
学位论文 |
