硅基多晶立方相SiC微机械谐振器的模型及工艺研究
| Contribuinte(s) |
孙国胜 |
|---|---|
| Data(s) |
2008
|
| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z Made available in DSpace on 2009-04-13T11:45:31Z (GMT). Made available in DSpace on 2009-07-09T01:37:07Z (GMT). No. of bitstreams: 1 disk/eh2008/wl.pdf: 2682374 bytes, checksum: 95ef82faa9f950b1578f747cb3a90188 (MD5) Previous issue date: 2008 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
王亮.硅基多晶立方相SiC微机械谐振器的模型及工艺研究.[硕士].北京.中国科学院半导体研究所.2008 |
| Palavras-Chave | #材料物理与化学 |
| Tipo |
学位论文 |
