蓝宝石衬底上ZnO 薄膜的MVPE 生长及性能研究
Contribuinte(s) |
李晋闽 |
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Data(s) |
2008
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Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z Made available in DSpace on 2009-04-13T11:45:31Z (GMT). Made available in DSpace on 2009-07-09T01:37:04Z (GMT). No. of bitstreams: 1 disk/eh2008/hjx.pdf: 1391304 bytes, checksum: 47d4273b4e49de68f0f2bff3642bb85f (MD5) Previous issue date: 2008 |
Identificador | |
Idioma(s) |
中文 |
Fonte |
何金孝.蓝宝石衬底上ZnO 薄膜的MVPE 生长及性能研究.[硕士].北京.中国科学院半导体研究所.2008 |
Palavras-Chave | #微电子与固体电子学 |
Tipo |
学位论文 |