蓝宝石衬底上ZnO 薄膜的MVPE 生长及性能研究


Autoria(s): 何金孝
Contribuinte(s)

李晋闽

Data(s)

2008

Resumo

Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z

Made available in DSpace on 2009-04-13T11:45:31Z (GMT).

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Identificador

http://ir.semi.ac.cn/handle/172111/5927

http://www.irgrid.ac.cn/handle/1471x/60525

Idioma(s)

中文

Fonte

何金孝.蓝宝石衬底上ZnO 薄膜的MVPE 生长及性能研究.[硕士].北京.中国科学院半导体研究所.2008

Palavras-Chave #微电子与固体电子学
Tipo

学位论文