AlN薄膜的生长及其物性研究
| Contribuinte(s) |
刘祥林 朱勤生 |
|---|---|
| Data(s) |
2007
|
| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z Made available in DSpace on 2009-04-13T11:45:31Z (GMT). Made available in DSpace on 2009-07-09T01:36:49Z (GMT). No. of bitstreams: 1 disk/eh2007/hwg.pdf: 3385287 bytes, checksum: f1cf3b70350839e9febb760571efc53c (MD5) Previous issue date: 2007 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
胡卫国.AlN薄膜的生长及其物性研究.[博士].北京.中国科学院半导体研究所.2007 |
| Palavras-Chave | #材料物理与化学 |
| Tipo |
学位论文 |
