高Al组分AlGaN薄膜的MOCVD生长和特性研究
| Contribuinte(s) |
梁骏吾 杨辉 赵德刚 |
|---|---|
| Data(s) |
2007
|
| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z Made available in DSpace on 2009-04-13T11:45:31Z (GMT). Made available in DSpace on 2009-07-09T01:36:42Z (GMT). No. of bitstreams: 1 disk/eh2007/wxl.pdf: 6134108 bytes, checksum: dc653f91aaca66336112952bf877ff77 (MD5) Previous issue date: 2007 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
王小兰.高Al组分AlGaN薄膜的MOCVD生长和特性研究.[博士].北京.中国科学院半导体研究所.2007 |
| Palavras-Chave | #微电子学与固体电子学 |
| Tipo |
学位论文 |
