4H-SiC 同质外延生长与器件制作
| Contribuinte(s) |
李晋闽 孙国胜 |
|---|---|
| Data(s) |
2005
|
| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z Made available in DSpace on 2009-04-13T11:45:31Z (GMT). Made available in DSpace on 2009-07-09T01:36:17Z (GMT). No. of bitstreams: 1 disk/eh2005/gx.pdf: 4759797 bytes, checksum: 59918248963417878a99498fae200ea6 (MD5) Previous issue date: 2005 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
高欣.4H-SiC 同质外延生长与器件制作.[博士].北京.中国科学院半导体研究所.2005 |
| Palavras-Chave | #材料物理与化学 |
| Tipo |
学位论文 |
