新型高K 栅介质材料的制备和性质研究
| Contribuinte(s) |
陈诺夫 |
|---|---|
| Data(s) |
2005
|
| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z Made available in DSpace on 2009-04-13T11:45:31Z (GMT). Made available in DSpace on 2009-07-09T01:36:07Z (GMT). No. of bitstreams: 1 disk/eh2005/lyl.pdf: 2117834 bytes, checksum: 62d37bb746e6156707b1f1a8feac64a0 (MD5) Previous issue date: 2005 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
李艳丽.新型高K 栅介质材料的制备和性质研究.[博士].北京.中国科学院半导体研究所.2005 |
| Palavras-Chave | #材料物理与化学 |
| Tipo |
学位论文 |
