火焰水解法制备硅基二氧化硅光波导的研究


Autoria(s): 郜定山
Contribuinte(s)

胡雄伟

Data(s)

2004

Resumo

Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z

Made available in DSpace on 2009-04-13T11:45:31Z (GMT).

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Identificador

http://ir.semi.ac.cn/handle/172111/5301

http://www.irgrid.ac.cn/handle/1471x/60212

Idioma(s)

中文

Fonte

郜定山.火焰水解法制备硅基二氧化硅光波导的研究.[博士].北京.中国科学院半导体研究所.2004

Palavras-Chave #微电子学与固体电子学
Tipo

学位论文