VHF-PECVD法高速沉积氢化非晶/纳米晶相变阈硅薄膜及太阳能电池
| Contribuinte(s) |
廖显伯 |
|---|---|
| Data(s) |
2004
|
| Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z Made available in DSpace on 2009-04-13T11:45:31Z (GMT). Made available in DSpace on 2009-07-09T01:35:55Z (GMT). No. of bitstreams: 1 disk/eh2004/xyy.pdf: 2636540 bytes, checksum: 0709e6a368cd7e111bda1410c739b1b7 (MD5) Previous issue date: 2004 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
徐艳月.VHF-PECVD法高速沉积氢化非晶/纳米晶相变阈硅薄膜及太阳能电池.[博士].北京.中国科学院半导体研究所.2004 |
| Palavras-Chave | #材料物理与化学 |
| Tipo |
学位论文 |
