硅基 1×3微机械光开关的研究


Autoria(s): 贾玉斌
Contribuinte(s)

陈良惠

李玉璋

Data(s)

2002

Resumo

Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z

Made available in DSpace on 2009-04-13T11:45:31Z (GMT).

Made available in DSpace on 2009-07-09T01:35:45Z (GMT). No. of bitstreams: 1 disk/eh2002/jyb.pdf: 703200 bytes, checksum: eeaac4fa089d7125be7a0b7454e2d289 (MD5) Previous issue date: 2002

Identificador

http://ir.semi.ac.cn/handle/172111/5147

http://www.irgrid.ac.cn/handle/1471x/60135

Idioma(s)

中文

Fonte

贾玉斌.硅基 1×3微机械光开关的研究.[博士后].北京.中国科学院半导体研究所.2002

Palavras-Chave #固体物理与微电子学
Tipo

学位论文