硅基 1×3微机械光开关的研究
Contribuinte(s) |
陈良惠 李玉璋 |
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Data(s) |
2002
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Resumo |
Submitted by zhangdi (zhangdi@red.semi.ac.cn) on 2009-04-13T11:45:31Z Made available in DSpace on 2009-04-13T11:45:31Z (GMT). Made available in DSpace on 2009-07-09T01:35:45Z (GMT). No. of bitstreams: 1 disk/eh2002/jyb.pdf: 703200 bytes, checksum: eeaac4fa089d7125be7a0b7454e2d289 (MD5) Previous issue date: 2002 |
Identificador | |
Idioma(s) |
中文 |
Fonte |
贾玉斌.硅基 1×3微机械光开关的研究.[博士后].北京.中国科学院半导体研究所.2002 |
Palavras-Chave | #固体物理与微电子学 |
Tipo |
学位论文 |